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THE PHYSICS OF MICRO/NANO-FABRICATION IBD

SPRINGER
01 / 1993
9780306441462
Inglés

Sinopsis

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

PVP
272,76